메뉴 바로가기 본문 바로가기

PART

Lead is an expert in the field of semiconductor furnace
equipment manufacturing and refurbishment.

Bubbler with stable temperature control ability

BUBBLER – Stable temperature control and maintenance, can be modified to meet customers’ needs.

No Type TS-15A Remark
1 Cooling method Electric -
2 Heating method Air-cooled -
3 Control method PID Control -
4 Ambient temperature/humidity +10℃ ~ +39℃ / 30~80%RH
(No condensation)
-
5 Temperature range for setting +10℃ ~ +35℃ -
6 Cooling capacity 100W -
7 Heating method 110W -
8 Temperature stability ±0.1℃ -
9 Power AC 100V ~ 240V, 50/60Hz -
10 Circuit protector Heating: 1A / Cooling / 20A -
11 Current consumption 2A or less -
12 Communication Contact / RS-485 Option
13 Accessories Power cable -
14 Temperature control Min 200ml -
15 Temperature control Max 2500ml -

Supply of excellent SiC components and fast delivery response

SIC – SiC with excellent composition, fast turnaround

Oxidation & LP-CVD Furnace SiC Parts
Available delivery periods
3 months to 1 year (Please check if you need specialized products)

Supply of excellent quartz ingredients and fast delivery response

QUARTZ - High-quality Quartz supply, fast turnaround

Oxidation & LP-CVD furnace and RTP equipment quartz parts
Available delivery periods
Supply within 3 months (on-hand inventory can be shipped immediately)