반도체 장비개발 / Parts 국산화

  • 연락처

  • • 전화번호 : 043-231-7900~1

    • 팩스 : 043-231-7902

    • 이메일
        Furnace : kgw@lead-eng.co.kr
        CVD : chaos@lead-eng.co.kr

RTP

  > 제품소개 > RTP

High Temperature RTP System

Hardware Spec
Wafer Size 4”~8”
Maximum
Temperature		 1200 ℃
Temperature
uniformity		 600~1100℃ ± 0.5℃
Wafer capacity Single wafers
System control PLC & PC control base