반도체 장비개발 / Parts 국산화

  • 연락처

  • • 전화번호 : 043-231-7900~1

    • 팩스 : 043-231-7902

    • 이메일
        Furnace : kgw@lead-eng.co.kr
        CVD : chaos@lead-eng.co.kr

산업용 Furnace

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High Temperature Vertical Furnace (450mm)

Hardware Spec
Wafer Size 4”~12”
Maximum
Temperature		 1300 ℃
Temperature
uniformity		 800~1280℃ ± 0.5℃
Process Well Drive ,Wet-Oxidation
Wafer capacity 50 ~ 100 wafers/tube(Expandable)
System control PLC & PC control base