반도체 장비개발 / Parts 국산화

  • 연락처

  • 전화번호 : 043-231-7900~1

    팩스 : 043-231-7902

    이메일
        Furnace : kgw@lead-eng.co.kr
        CVD : chaos@lead-eng.co.kr

Vertical Furnace

High Temperature & LP-CVD Vertical Furnace

Hardware Spec
Wafer Size 4”~12”
Maximum
Temperature
1300 ℃
Temperature
uniformity
800~1250℃ ± 0.5℃
Process Wet-Oxidation,Pocl3,BBR3,Nitride,D-Poly,Teos
Wafer capacity 50 ~ 100 wafers/tube(Expandable)
System control PLC & PC control base