Semiconductor Equipment & Parts Development

  • Contact

  • • Tel : 043-231-7900~1

    • Fax : 043-231-7902

    • Email
        Furnace : kgw@lead-eng.co.kr
        CVD : chaos@lead-eng.co.kr

RTP

  > Product > RTP

High Temperature RTP System

Hardware Spec
Wafer Size 4”~8”
Maximum
Temperature		 1200 ℃
Temperature
uniformity		 600~1100℃ ± 0.5℃
Wafer capacity Single wafers
System control PLC & PC control base